Infrared Confocal Microscope
OPTELICS IR
NEW
Enabling non-destructive, non-contact high-resolution IR observation and high-accuracy measurement using confocal optics with high-brightness IR illumination
Topics
Product Outline
OPTELICS IR is an effective tool for observing the internal structure of silicon wafers and devices made from IR-transmissive materials. In the rapidly growing advanced packaging market, it is especially suited for R&D and process optimization applications such as alignment measurement, void detection, and adhesive peeling observation.
Features
- High-brightness IR confocal optics
- High-resolution observation at wavelengths from 1000nm to 1500nm
- High-accuracy measurement in the XY directions
- Height measurement using optical sectioning in the Z-axis direction
Applications
- Observation of the internal structure of IR-transmissive materials such as silicon wafers
- Inspection and evaluation of 3D packaging
- Analysis of internal defects in advanced packaging devices
- Non-destructive etching volume measurement in oxide sacrificial layer etching
- Lamination alignment measurement
- SOI active layer thickness measurement
