Phase-Shift and Transmittance Measurement System
MPM193EX
Phase shift and transmittance of Phtomask become measurable after cleaning and pellicle mounting
Topics
Features
- Measurement performance is remarkably improved as a successor system to MPM193 Phase Shift Measurement System that has been a de facto standard in the industry.
- Masks with pellicle mounted can be measured.
- Auto inspection function is significantly improved compared with that of the conventional system.
- Phase Shift measurement over micro area of 1μm scale or less is possible.
- Autoloader and mini-environment with chemical filter are standard components.
Applications
- Phase shift measurement of phase shift mask (PSM)
- Transmittance measurement of attenuated or half tone PSM
- Mask defect review (Option)
Specifications
| Measurement wavelength | 193nm |
|---|---|
| Measurement repeatability | 0.2°(3σ), 0.04% (3σ) |
| Substrate size | 6025 |
