Phase-Shift Measurement System
MPM248
A de facto standard phase-shift measurement system for KrF wavelength
Features
- Phase-shift measurement system for KrF (248nm), which is now the de facto standard in the industry
- Directly measures phase-shift with the same wavelength as the exposure wavelength of steppers
- Can measure transmittance of Att-PSM's (Half-tone type phase-shift masks).
- Realized high stability against floor vibration, and air turbulence within the system.
Applications
- Phase-Shift Measurement of phase-shift masks
- Transmittance measurement of Att-PSM's (Half-tone type phase-shift masks)
Specifications
| Substrate Size | 6025 |
|---|---|
| Measurement Wavelength | 248nm |
| Measurement Repeatability | Phase-shift measurement:0.5°(3σ) Transmittance measurement:0.2% (3σ) |
