Product list

A

NEW
ACTIS A300 Series
Actinic EUV Patterned Mask Inspection System
ACTIS A300 Series
ACTIS A150
Actinic EUV Patterned Mask Inspection System
ACTIS A150
ABICS E120
EUV Mask Blanks Inspection and Review System
ABICS E120

B

BASIC Series
EUV Mask Backside Inspection and Cleaning System
BASIC Series
BGM300
TSV Back Grinding Process Measurement System
BGM300
BIM300
Wafer Bump Inspection and Measurement System
BIM300

C

CIRIUS Series
High Sensitivity Under-layer Defect Inspection and Review System
CIRIUS Series
CIEL Series
High Sensitivity Wafer Edge Inspection System
CIEL Series
CLIOS G10 Series
FPD Photomask Inspection System
CLIOS G10 Series
CLIOS G834Advance
FPD Photomask Inspection System
CLIOS G834Advance
CLIOS G800LITE
FPD Photomask Inspection System
CLIOS G800LITE

E

EZ300
Wafer Edge Inspection System
EZ300
ECCS B320
Electro-Chemical Reaction Visualizing Confocal System
ECCS B320

G

GALOIS211
GaN Wafer Inspection and Review System
GALOIS211

L

LX Series
Multi-Wavelength Wafer Inspection System
LX Series
LBIS Series L852/L1052
FPD Mask Blanks Inspection System
LBIS Series L852/L1052

M

MATRICS X9ULTRA Series
Mask Inspection System
MATRICS X9ULTRA Series
MATRICS X8ULTRA Series
Mask Inspection System
MATRICS X8ULTRA Series
MAGICS Series M9650/M9651
Mask Blanks Inspection and Review System
MAGICS Series M9650/M9651
MZ100
Mask Edge Inspection System
MZ100
MATRICS X810EX Series
Mask Inspection System
MATRICS X810EX Series
MATRICS X800LITE Series
Mask Inspection System
MATRICS X800LITE Series
MAGICS Series M6750/M6751
Mask Blanks Inspection and Review System
MAGICS Series M6750/M6751
MAGICS Series M6640S/M6641S
Mask Blanks Inspection and Review System
MAGICS Series M6640S/M6641S
MPM193EX
Phase-Shift and Transmittance Measurement System
MPM193EX
MPM248
Phase-Shift Measurement System
MPM248
MAGICS Series M5640
Wafer Inspection and Review System
MAGICS Series M5640

O

OPTELICS HYBRID+
Laser Microscope
OPTELICS HYBRID+
OPTELICS AI²
Automatic Inspection and Review System
OPTELICS AI²

P

71PA CM
Pellicle Inspection and Pellicle Mounting System for CLIOS
71PA CM
51PA CM
Pellicle Inspection and Pellicle Mounting System for CLIOS
51PA CM

S

NEW
SICA108
SiC Wafer Inspection and Review System
SICA108
SICA88
SiC Wafer Inspection and Review System
SICA88

V

NEW
VIANCA Series
Via Depth Measurement System
VIANCA Series
VL3000DX-SVF18SP
In-Situ Observation at Ultra High Temperature Confocal Scanning Laser Microscope
VL3000DX-SVF18SP

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A collection of technical words often used with Lasertec products and technologies
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Schedule of events where Lasertec will exibit products
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