FPD Photomask Inspection System
CLIOS G834Advance
Achieving significantly higher sensitivity for high-end FPD mask inspection
Topics
Features
- New optical system and autofocus mechanism achieving a maximum sensitivity of 0.3µm and up to more than 90% reduction in false defects
- Newly developed algorithm detecting small contact hole defects and local critical dimension errors
- Monitoring of critical dimension uniformity (optional function)
- Auto defect image recording function enabling offline review
- Ability to conduct Die to Die inspection and Die to Database inspection simultaneously (Combo mode)
Applications
- Inspection during high-end FPD mask production and pre-shipping quality assurance inspection
Specifications
| Applicable mask size | 800mm (W) x 520mm (H) ~ 1,550mm (W) x 1,300mm (H) |
|---|---|
| Maximum detection sensitivity | 0.3µm (to be assured with Lasertec standard mask) |
| Scan speed | 78mm per second (Normal), 156mm per second (Fast) |
| Outer dimensions | 5,000mm (W) x 1,815mm (D) x 3,000mm (H) |
| Weight | Approx. 8,500kg (not including rack) |
