OPTELICS HYBRID+ | Lasertec Corporation

HYBRID Laser Microscope

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Industry's first hybrid laser microscope

HYBRID⁺ meets your needs in various measurement scenes

Offering 6 functions to address a variety of needs
Meeting industry-leading specifications and achieving high precision
Offering a variety of measurement, analysis and support functions for superior usability
Automated operation for higher efficiency

What is a confocal microscope?

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Features

Offering 6 functions to address a variety of needs

HYBRID⁺ offers 6 functions from a single platform - two types of confocal optics, differential interference contrast, vertically scanning white light interferometry, phase shift interferometry measurement, and spectroscopic reflectometry film thickness measurement. It addresses a variety of needs that would normally require the use of multiple tools.

White light confocal

HYBRID⁺ works as a white light confocal microscope, performing high-definition, full-color observation and high-precision 3D profile measurement.

Laser confocal

HYBRID⁺ works as a laser confocal microscope using confocal optics and a laser light source together. It enables high magnification, high resolution observation and measurement comparable to the performance of scanning electron microscopes.

Differential interference contrast

The combination of confocal optics and differential interference contrast enables the high-contrast visualization of ultrafine topography in real time.

Vertical scanning white light interferometry measurement

This function uses interferometry to perform both the nanometer-scale measurement of topography and the wide-area undulation measurement of wafers and films. It uses a two-beam interference objective lens to enable the highly precise profile measurement of nanometer-scale topography over a millimeter-scale large area.

Phase shift interferometry measurement

This function uses interferometry to perform angstrom-scale topography measurement.

Spectroscopic reflectometry film thickness measurement

This function uses reflectometry to perform thickness measurement of transparent films less than 1 micrometer in thickness.

Meeting industry-leading specifications and achieving high precision

HYBRID⁺ achieves industry-leading performance of laser microscopes for various observation and measurement applications.

High-speed measurement

HYBRID⁺ achieves industry-leading high-speed frame rate (15Hz), bringing superior performance in image stitching, automated measurement, automated defect detection, and high-speed moving image observation.

High precision measurement

HYBRID⁺ achieves the industry-leading accuracy and repeatability of measurement

Offering a variety of measurement, analysis and support functions for superior usability

LM eye, the measurement and analysis software of HYBRID⁺, offers a variety of functions that assist your smooth operation.

Measurement and analysis functions

These functions enable the measurement and analysis of parameters including profile, roughness, and film thickness

Measurement support functions

HYBRID⁺ offers a variety of measurement, analysis and support functions for superior usability

Automated operation for higher efficiency

Lasertec offers the best solution to your measurement needs, regardless of whether it requires a standard tool or customization for your production process.

LIBRA

LIBRA is a software program that performs automated measurement with a motorized stage as specified by recipes.

LM Inspect

LM Inspect is a software program that enables the automated inspection of small particles and defects on substrates. It also enables high precision defect classification using defect review and Deep Learning.

W series

W series is a model equipped with a fully automated transfer system to meet the requirements of production lines.

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