High precision measurement
The precision of measurement is indicated by accuracy and repeatability. Accuracy means how close a measurement result is to the true value. Repeatability means how small a variation exists among multiple measurement results. HYBRID+ achieves industry-leading accuracy and repeatability in the measurement of both horizontal length and height. HYBRID+ demonstrates superior performance in the long-term stability of measurement precision.
Width measurement |
Accuracy | ±[0.02×(100/magnification of objective lens)+L/1000]μm |
---|---|---|
Repeatability(3σ) | 0.01μm | |
Height measurement |
Accuracy | ±(0.11+L/100)μm |
Repeatability(σ) | 0.01μm |
Traceability
HYBRID+ is calibrated traceably based on national measurement standards. If requested, we will do pre-shipping calibration or calibration in the customer's operating environment. Inspection and calibration certificates are issued at the time of calibration. You can rely on HYBRID+ for your quality assurance needs.
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