OPTELICS HYBRID⁺

Specifications

Model				Basic model C3	Standard model L3	High-end model L7
Function				White light confocal	White light confocal Laser confocal	White light confocal Laser confocal Differential interference contrast observation Optical interference measurement Spectroscopic reflectometry film thickness measurement
Light source	Xenon / LED			✓
Light source	Laser			-	405 nm
FOV / Magnification	Light source	Objective lens	24-inch screen magnification	FOV (HxV)
	White light	1×	18.5×	15,000 × 15,000 μm
		2.5×	46.2×	6,000 × 6,000 μm
		5×	92.5×	3,000 × 3,000 μm
		10×	185×	1,500 × 1,500 μm
		20×	370×	750 × 750 μm
		50×	925×	300 × 300 μm
		100×	1,850×	150 × 150 μm
		150×	2,775×	100 × 100 μm
	Laser	50×	1,850×	-	150 × 150 μm
		100×	3,700×	-	75 × 75 μm
		150×	5,550×	-	50 × 50 μm
Zooming				1×~8×
Frame memory			Brightness	1,024×1,024×12 bit / High definition mode 2,048×2,048×12 bit
Frame memory			Height	1,024×1,024×16 bit / High definition mode 2,048×2,048×16 bit
Frame rate				15 Hz~120 Hz
Width measurement	Minimum unit of measurement			0.001 μm
	Accuracy			± [ 0 .02 × (100/Objective lens magnification)+L /1000 ] μm
	Repeatability(3σ)^*1			10 nm
Height measurement	Scale resolution			0.05 nm
	Accuracy			±(0.11＋L/100) μm
	Repeatability(σ)^*2			10 nm
	Measurement range^*3			7 mm
Z stroke				100 mm		80 mm
Nosepiece				5-hole motorized revolving nosepiece (with auto lens position recognition)
XY stage	Manual			✓		-
XY stage	Motorized			Options		✓
Differential interference contrast observation				Options		✓
Vertically-scanned white light interferometer				Options		✓
Phase shift interferometer				Options
Spectroscopic reflectometer measurement				Options		✓
Software	Image capture			HDR mode, Patchwork, multi-gain, etc.
	Image processing			Surface shape correction (tilt, spherical), noise elimination, filter, color extraction, binarization, etc.
	Profile analysis			Profile measurement, comparison measurement, surface roughness measurement, width and pitch measurement, film thickness measurement
	Data output			Dedicated extension, general use image file, CSV file, STEP file
	Efficiency tool			M Carte, filter assist, macro function, surface roughness suggest, Office report
Utility				AC:100 V 50/60 Hz approx.800 VA
Dimensions and weight	Microscope unit			382(W) × 511(D) × 689(H) mm approx.40 kg
	Control unit			430(W) × 450(D) × 100(H) mm approx.7 kg
	Light source unit			142(W) × 279(D) × 210(H) mm approx.3.8 kg
	Lamp house			142(W) × 311(D) × 227(H) mm approx.6.7 kg
	PC			175(W) × 440(D) × 360(H) mm approx.9 kg
	Monitor			556(W) × 180(D) × 513(H) mm approx.4 kg
Traceability				✓

*1Based on reference pattern measurement using 100x (NA0.95) under no vibration condition.
*2Based on the measurement of VLSI Standards' step height standards using 100x (NA0.95) under no vibration condition.
*3Up to the maximum distance of objective lens movement