History

Starting from the world's first achievement - 35 years of microscope development by Lasertec
We released the world's first industrial color laser confocal scanning microscope in 1985.
Since then, we have been dedicated to developing state-of-the-art microscopes.
In 1985
The world's first

Industrial color laser confocal scanning microscope
2LM11

Product outline

This is the world's first color laser confocal scanning microscope for industrial application. It was released at SEMICON West exhibition in May 1985 and later announced in Japan. It adopted a three-color light source using a He-Ne laser (633nm red) and an Ar laser (533nm green and 488nm blue) together and RGB detectors to enable high-definition color image observation in real time.

Main features

  1. 1Laser microscope capturing full color images
  2. 2High-speed scan for real-time observation
  3. 3Confocal optics for high-resolution, high-contrast imaging
In 1987

Red laser confocal scanning microscope
1LM21

Product outline

This is a laser microscope that uses only a He-Ne laser (633nm) for its light source to meet the market need for low cost tools. This monochromatic laser confocal scanning microscope is compact and attachable to the lens barrel of an optical microscope to perform high-resolution, high-magnification observation. Width and height measurement capability was added later on to expand the scope of its application.

Main features

  1. 1High-speed scan for real-time monochromatic observation
  2. 2Confocal optics for high resolution, high contrast imaging
  3. 3Non-contact surface profiling
In 1999

Blue laser confocal scanning microscope
VL2000D

Product outline

This is a monochromatic laser microscope using a blue laser diode (408nm), a new invention at that time, for its light source to meet the need for high-resolution microscopes in semiconductor and other industries where the scaling of microfabrication was in progress at an accelerated pace. It achieved 0.14µm resolution, dramatically higher than the previous models, by combining a newly designed optical system with a blue laser diode. Its maximum magnification was 7,200x on the monitor (with a 200x objective lens).

Main features

  1. 1High-speed scan for real time observation
  2. 2Improved observation performance for low reflectivity samples and slopes
  3. 3High-precision measurement of line widths and heights
  4. 4Laser scale for high-resolution, high-repeatability height measurement
In 2001

White light, wide field of view confocal scanning microscope
HD100D

Product outline

Measurement needs diversified with the widespread use of laser microscopes in various industries. Previously, high-magnification observation and fine-pattern measurement had been their main applications, but new needs arose for the large-area observation of machine and other parts and the profile measurement of uneven surface. To meet those needs, we developed HD100D, a monochromatic confocal microscope based on a brand-new concept. HD100D uses a white light source and has a wide field of view. Its newly designed confocal optical system illuminates samples at a large incident angle even when a low-magnification objective lens is used. It performs highly precise 3D measurement with little noise even for samples with steep slopes or uneven surface.

Main features

  1. 1Highly precise measurement with a wide field of view (at low magnification)
  2. 2Clear visualization of samples with steep slopes when used with a newly developed high-NA objective lens
  3. 3White light interferometry measurement capability
In 2003

Real color confocal scanning microscope
OPTELICS C130

Product outline

We developed a series of color confocal microscopes amid growing demand for the observation and measurement of samples with color information such as color filters. It is a compactly packaged real-color confocal microscope. Its light source is a xenon lamp whose spectrum closely resembles the sun light.

C130 Main features

  1. 1High-definition full-color imaging
  2. 2Individual and simultaneous RGB data collection
  3. 3Improved operability with easy-to-use body design and ergonomic console, and high-rigidity, low COG, compact and anti-vibration structure
In 2005

Real color confocal scanning microscope
OPTELICS S130

S130 Main features

  1. 1Five wavelengths of light (405nm, 436nm, 546nm, 577nm and 630nm) available for selection to fit various sample needs
  2. 2Phase-shift interferometry enabling nanometer-scale ultrafine topography measurement in addition to confocal
In 2007

3CCD real color confocal scanning microscope
H1200 WIDE

Product outline

This is a multi-functional confocal microscope developed in response to demand for a system capable of performing different types of measurement quickly on a single platform. It uses a xenon lamp for its light source and three photodetectors, each corresponding to R, G, or B, to pursue superior performance in color imaging and multiple functions. It offers four options - wavelength selection (W), white light interferometry measurement (I), differential interference contrast observation (D), and AFM (E) - to meet various measurement needs in wide-ranging scales from nanometers to millimeters.

Main features

  1. 1Real color confocal imaging
  2. 2High-speed data processing
    Variable frame rates between 7.5Hz and 120Hz for high-speed measurement
  3. 3WIDE options for various measurement needs
    • Wave (wavelength selection)
      Six wavelengths of light (405nm, 436nm, 488nm, 546nm, 577nm, and 630nm) available for selection to perform optimal observation and measurement of various samples
    • Interferometer (white light interferometry measurement)
      Interferometry combined with confocal optics to achieve a large dynamic range from nanometers to millimeters
    • DIC (differential interference contrast observation)
      Differential interference combined with contrast optics to clearly visualize ultrafine surface morphology; and very short depth of focus to enable the observation of sample surface without interference of back surface reflection
    • Exceed (atomic force microscope)
      Integration of AFM to enable measurement at wide-ranging scales from nanometers to millimeters seamlessly
In 2013

Multi-functional white light and laser confocal scanning microscope
OPTELICS HYBRID

Product outline

This is the first hybrid confocal microscope in the industry that features both white light and laser light sources to address various needs for microscopes, including the need to measure samples with high precision, with a wide field of view, or at high magnification. With two optics integrated in a single body, it offers 6 different functions (white light confocal, laser confocal, vertically scanning white light interferometry measurement, phase shift interferometry measurement, spectroscopic reflectometry film thickness measurement and differential interference contrast observation) from the same platform, eliminating the need to buy different tools for different operations.

Main features

  1. 1White light confocal
    • 12-megapixel high-definition full-color imaging
  2. 2Laser confocal
    • High magnification and high resolution
  3. 3Differential interference contrast observation
  4. 4Optical interferometry measurement
  5. 5Spectroscopic reflectometry film thickness measurement
  6. 6Automated operation
    • Measurement options
    • Auto measurement (LIBRA)
    • Auto inspection (LM Inspect)
In 2020

Multi-functional white light and laser confocal scanning microscope
OPTELICS HYBRID+

Product outline

This is the latest model of OPTELICS HYBRID. Drawing on the experience of the series, it pursues the ultimate performance and usability.

Main features

  1. 1Multi-functional

    Two optics integrated in a single body, and six functions (white light confocal, laser confocal, vertically scanning white light interferometry measurement, phase-shift interferometry measurement, spectroscopic reflectometry film thickness measurement, and differential interference contrast observation) available from the same platform

  2. 2Industry-leading hardware design
  3. 3Highly usable software programs such as LM Carte and noise filtering assist
  4. 4Automated measurement software
    • Auto measurement (LIBRA)
    • Auto inspection (LM Inspect)

    Highly accurate defect classification based on deep learning

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