FPD Photomask Inspection System
CLIOS G800LITE
Enabling cost-effective inspection of middle-end FPD masks
Topics
Features
- Single-eye, single-magnification Die-to-Database inspection system adopting i-line optics (using the shortest wavelength of light among Lasertec FPD mask inspection systems)
- New TDI and newly developed AF achieving a maximum detection sensitivity of 0.6µm
- Inspecting whole G8 mask in about 3 hours despite single eye system
- Auto defect image recording function enabling offline review
- Dedicated to Die to Database inspection and delivering high sensitivity whole mask inspection for any pattern layout
Applications
- Inspection during middle-end FPD mask production and pre-shipping quality assurance inspection
Specifications
| Applicable mask size | 800mm (W) x 520mm (H) ~ 1,550mm (W) x 1,300mm (H) |
|---|---|
| Maximum detection sensitivity | 0.6µm (to be assured with Lasertec standard mask) |
| Scan speed | 125mm per second |
| Outer dimensions | 5,000mm (W) x 1,815mm (D) x 3,000mm (H) |
| Weight | Approx. 8,400kg (not including rack) |
