Lasertec Releases Infrared Confocal Microscope “OPTELICS IR”
2025.01.20
Enabling non-destructive, non-contact high-resolution IR observation and high-accuracy measurement using confocal optics with high-brightness IR illumination
Lasertec Corporation announced today the release of OPTELICS IR, a confocal microscope that uses infrared (“IR”) light for illumination.
Description
Lasertec is a manufacturer of unique, high-value products, including confocal microscopes used primarily for observation and measurement of samples in research and development applications.
The newly released OPTELICS IR features confocal optics with high-brightness IR illumination, which enable non-destructive, non-contact high-resolution IR observation and high-accuracy measurement. OPTELICS IR can be used effectively for observing the internal structure of silicon wafers and devices made from IR-transmissive materials. In the rapidly growing advanced packaging market, it is especially suited for R&D and process optimization applications such as alignment measurement, void detection, and adhesive peeling observation.
Lasertec will continue to develop unique solutions that meet customer needs to facilitate quality improvement and productivity enhancement, thereby contributing to the advancement of the semiconductor industry.
Features
- High-brightness IR confocal optics
- High-resolution observation at wavelengths from 1000nm to 1500nm
- High-accuracy measurement in the XY directions
- Height measurement using optical sectioning in the Z-axis direction
Applications
- Observation of the internal structure of IR-transmissive materials such as silicon wafers
- Inspection and evaluation of 3D packaging
- Analysis of internal defects in advanced packaging devices
- Non-destructive etching volume measurement in oxide sacrificial layer etching
- Lamination alignment measurement
- SOI active layer thickness measurement