CLIOS G10 Series enables the high-sensitivity, high-throughput inspection of Generation 10.5 photomasks used for manufacturing large flat panel displays. 71PA CM is designed for the remote operation of pellicle mounting in various sizes up to Generation 10.5 in a clean environment immediately after the completion of mask inspection.

Recently, manufacturers in the FPD industry have been busy responding to the need for small and medium-sized high-resolution displays used on smartphones and tablets and for large-sized panels of the high-definition 4K and 8K TVs. Mask pattern scaling and panel size enlargement are progressing rapidly. A number of investments continue to be made for building production facilities - for Generation 10.5 liquid crystal displays in China and for organic LED displays in Korea - and, therefore, there is growing demand for FPD photomask inspection systems.

In response to this market need, Lasertec has launched the FPD photomask inspection system for Generation 10.5 and the pellicle inspection and mounting system, thereby contributing to the development and production of high-quality photomasks.