EAPSM Att-PSM
Description
Embedded Attenuated Phase Shift Mask (EAPSM), Attenuated Phase Shift Mask (Att-PSM) is alias name for half tone type phase shift mask.
Description
Embedded Attenuated Phase Shift Mask (EAPSM), Attenuated Phase Shift Mask (Att-PSM) is alias name for half tone type phase shift mask.