MAGICS series mask blank inspection and review system has been recognized as a highly reputable de facto standard tool over many years. It is widely used for outgoing inspection at mask blank manufacturers and for incoming inspection and process management at mask shops. In the field of mask technology, various innovations have been made recently, such as the introduction of extreme ultraviolet (EUV) and new architecture masks, to enable further scaling in cutting-edge nodes. In this respect, it is imperative that mask blank inspection is conducted with better performance and functionality.

Lasertec has developed M9650/51, the latest line of MAGICS series system, to meet the needs of next-generation technology. It provides superior sensitivity performance in the inspection of EUV mask blanks, optical mask blanks, and their substrates. Using the core technology of MAGICS as its base, M9650/51 has adopted new inspection optics and the high-speed inspection circuitry technology of our patterned mask inspection system. As a result, it has achieved significantly higher sensitivity in the detection of small defects.

We have already received a number of customer inquiries and won multiple-unit orders for M9650/51.

Lasertec is dedicated to facilitating the quality assurance of next-generation high-end mask blanks as well as to improving incoming inspection and manufacturing process management at mask shops.