Lasertec published a technical paper at BACUS* 2018 regarding a development of Actinic Patterned Mask Inspection (APMI) for EUVL.

* BACUS is international professional organization for Photomask Technology and EUV Lithography, which belongs to SPIE (The international society for optics and photonics). BACUS is also the name of international conference which is held in September in Monterey California.